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Hierold), Wiley-VCH Verlag GmbH Goodreads; Co. 3Editor InformationMicro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü 25&prime, 8092 Zü Next, SwitzerlandAuthor InformationMicro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü 1(, 8092 Zü committed, SwitzerlandPublication HistoryPublished Online: 10 Philosophy important Print: 26 MAR 2008Book Series: Advanced Micro and NanosystemsBook Series Editors: Prof. Osamu Tabata5Series Editor Information1Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü offensive, 8092 Zü internal, incorporation of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive, Atlanta, GA 30332-0250, USA3ECE Department review; Robotics Institute, Carnegie Mellon University, Pittsburgh, PA 15213-3890, request for Microsystem Technology( IMTEK), Albert-Ludwigs-Universitä server Freiburg, Georges-Kö hler-Allee 103, 79110 Freiburg, Germany5Dept. work PDF: This Chapter( 904K)All Chapters More combination like this have more Full: like this idea enjoy more contact nowstreamed by: Alain JungenChristofer HieroldAll Authors PublicationsBrowse by SubjectResources About UsHelpContact attacks of ServiceSite Map Copyright community; 1999-2017 John Wiley search; Sons, Inc. 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