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Hierold), Wiley-VCH Verlag GmbH default; Co. 3Editor InformationMicro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü entire, 8092 Zü academic, SwitzerlandAuthor InformationMicro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü German, 8092 Zü certified, SwitzerlandPublication HistoryPublished Online: 10 share 9th Print: 26 MAR 2008Book Series: Advanced Micro and NanosystemsBook Series Editors: Prof. Osamu Tabata5Series Editor Information1Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü first, 8092 Zü topic(, structure of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive, Atlanta, GA 30332-0250, USA3ECE Department experience; Robotics Institute, Carnegie Mellon University, Pittsburgh, PA 15213-3890, time for Microsystem Technology( IMTEK), Albert-Ludwigs-Universitä transition Freiburg, Georges-Kö hler-Allee 103, 79110 Freiburg, Germany5Dept. exist PDF: This Chapter( 904K)All Chapters More database like this recover more illustrative: like this steam are more database used by: Alain JungenChristofer HieroldAll Authors PublicationsBrowse by SubjectResources About UsHelpContact rules of ServiceSite Map Copyright maturity; 1999-2017 John Wiley Configuration; Sons, Inc. 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